RFP 419165 for Electron Beam Lithography (EBL)

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The Center for Integrated Nanotechnologies (CINT) is a user-oriented research center whose mission is to provide the scientific basis for integration of nanoscale materials and enhanced performance. Research at CINT has an emphasis on exploring the path from scientific discovery to achieving new material properties and functionalities, including the integration of nanostructures into the micro and macro worlds.

Brookhaven Science Associates (BSA) is planning the procurement of an electron beam lithography (EBL) system for the CINT at Sandia National Laboratories (SNL). The lithography system will be procured by BSA on behalf of the CINT as part of the Nanoscale Science Research Center Recapitalization (NSRC-Recap) project. The lithography system, hereafter referred to as “Instrument”, shall be designed to facilitate the fabrication of sub-micron features down to the limits of current photomask materials, currently below 10nm. This new system will enable the innovations and discovery in areas of Quantum Material Systems, Nanomechanics, Nanophotonics and Nanomaterials.

BSA invites you to participate in accordance with the RFP letter and supporting enclosures. This requirement has been posted on the sam.gov website under Request for Proposals (RFP) 419165. Any questions concerning this RFP must be addressed via email to the attention of Maile Nichols at mnichols@bnl.gov.

The purpose of Amendment 1 to RFP 419165 is provide all potential offerors with the answers to the questions received in response to the solicitation.

Question 1: Please help differentiate the requirements for RFP 419165, Section 4.2, TAB 2. A and TAB 3 A. They seem to be asking for similar information, though TAB 2 requests a matrix format while TAB 3 requests multiple formats.

Answer 1: TAB 2.A is request for a paragraph-by-paragraph compliance matrix for each section of the Specifications and Statement of Work (SOW) that clearly shows the Offerors acceptance. Effectively, potential offerors shall provide a copy of the Specifications and SOW with responses to each paragraph noting how its offer complies, and explains how they will comply with, all requirements with each paragraph, with any exceptions clearly noted. TAB 3A speaks to the requirement for offerors, as part of its proposal, to provide specific detailed descriptions and capabilities for the main and sub-categories as it relates to the evaluation criteria (this section will be point scored).

Question 2: Please confirm both RFP 419165, Section 4.2, TAB 2 and TAB 3 are referring to the “Technical Specifications” beginning on Page 23 of Enclosure 1.

Answer 2: TAB 2 refers to the EBL Specifications and Statement of Work (SOW), see Enclosure 1, Attachments 1 and 2, respectively. TAB 3 refers to the EBL Specifications and Statement of Work (SOW), see Enclosure 1, Attachments 1 and 2, respectively. Again, in responding to TAB 3, Offerors shall provide specific detailed descriptions and capabilities for the main and sub-categories as it relates to the evaluation criteria (this section will be point scored).