Electron-beam Lithography System

Agency: VirginiaTech
State: Virginia
Type of Government: State & Local
Category:
  • 16 - Aircraft Components and Accessories
  • 66 - Instruments and Laboratory Equipment
Posted: Dec 5, 2022
Due: Jan 9, 2023
Solicitation No: 218672308
Publication URL: To access bid details, please log in.
Solicitation Number Addendum Ttitle/Description Solicitation Opening Date and Time
218672308 Electron-beam Lithography System
This Request for Proposal (RFP) seeks to solicit proposals for an Electron Beam Lithography (EBL) system by Virginia Polytechnic Institute and State University (Virginia Tech), an agency of the Commonwealth of Virginia. EBL is a high-resolution pattern generation technique widely used in research and development in the field of quantum sciences, optics, semiconductor processing, and microelectronics. The expected date for system installation and qualification is before May 2024.
1/9/2023 3:00:00 PM
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