Plasma Enhanced Chemical Vapour Deposition (PECVD) system and an Inductively...

Location:	British Columbia
Posted:	Oct 7, 2024
Due:	Nov 8, 2024
Agency:	Government of British Columbia
Type of Government:	State & Local
Category:	66 - Instruments and Laboratory Equipment
Solicitation No:	205332
Publication URL:	To access bid details, please log in.

Status:	Open
Opportunity ID:	205332
Opportunity Description:	Plasma Enhanced Chemical Vapour Deposition (PECVD) system and an Inductively Coupled Plasma Reactive Ion Etcher (ICP-RIE) system
Commodities:	Education and Training Services
Type:	Request for Proposal (BPS)
Issue Date and Time (Pacific Time):	2024-10-07 1:43:01 PM
Closing Date and Time (Pacific Time):	2024-11-08 2:00:00 PM
# of Amendments:	0
Last Updated:	2024-10-07 1:43:01 PM
Organization (Issued by):	Simon Fraser University
Organization (Issued for):
Interested Vendor List Available:	No

RFx General Information

Opportunity Type Request for Proposal (BPS)		Notice Type
Opportunity Description Plasma Enhanced Chemical Vapour Deposition (PECVD) system and an Inductively Coupled Plasma Reactive Ion Etcher (ICP-RIE) system
Opportunity ID		Status Open

Source System

General information for Plasma Enhanced Chemical Vapour Deposition (PECVD) system and an Inductively Coupled Plasma Reactive Ion Etcher (ICP-RIE) system - Lot : 1 / Amendment : 0

Issued by

Simon Fraser University

General information for Plasma Enhanced Chemical Vapour Deposition (PECVD) system and an Inductively Coupled Plasma Reactive Ion Etcher (ICP-RIE) system - Lot : 1 / Amendment : 0

Main Commodity

Education and Training Services

BC GSIN Commodities

Lot # Lot refers to a stage in an RFx.

Amendment #

Amendment History

Issue Date

2024-10-07 1:43:01 PM

Closing Date and Time

2024-11-08 2:00:00 PM

Delivery of Submissions

Submissions must be submitted using one of the following delivery methods:

BC Bid Electronic Submission: Submit an electronic Submission using BC Bid. Submissions must be in accordance with the requirements set out in the process rules for the subject RFx. Only pre-authorized electronic bidders registered on the BC Bid system can make an electronic Submission using the BC Bid system.

Email address

General information for Plasma Enhanced Chemical Vapour Deposition (PECVD) system and an Inductively Coupled Plasma Reactive Ion Etcher (ICP-RIE) system - Lot : 1 / Amendment : 0

Contact Address

Delivery of Submissions

Submissions must be submitted using one of the following delivery methods:

BC Bid Electronic Submission: Submit an electronic Submission using BC Bid. Only pre-authorized electronic bidders registered on the BC Bid system can make an electronic Submission using the BC Bid system.

Closing Location

Opening Date and Time (yyyy-MM-dd)

12:00:00 AM

View Unverified Bids

Opening Location

Summary Details

** Note: The RFP is available for download on Merx.com ***
** Note: The RFP must be submitted in Merx.com ***

The RFP invites offers for the provision of the following equipment:

A Plasma Enhanced Chemical Vapor Deposition (PECVD) system for depositing silicon-based materials.
An Inductively Coupled Plasma Reactive Ion Etcher (ICP-RIE) for metal etching.

The proponent must be able to supply both items.

THE DELIVERABLES

4D LABS at Simon Fraser University is acquiring infrastructure to enable further development of quantum- and microsystems-based technologies. In particular, they are seeking the following:

The tools will be housed in a class 100 Clean Room facility, alongside a variety of micro- and nanofabrication equipment.

Key requirements for the systems:
Please include the following instrument requirements in the proposal:

PECVD/ ICP-RIE Requirements:

Mandatory Specifications for PECVD and ICP-RIE

There is a basic configuration and performance specification that are mandatory. The proponent is to provide a quote for each item with these specifications in Appendix C – Rate Bid Form.

Optional Specifications for PECVD and ICP-RIE:

Non-mandatory specifications: This configuration is for additional options and is part of the Value-Add section in Appendix D.

Estimated Contract Duration (in months) The estimated contract duration includes the full length of the contract, including any potential extensions. Further details on the contract term may be described in the Rfx document and is subject to contract finalizaton.

Process

Additional Information

Official Contact Details

RFx Documents

0 Result(s)