Wafer Spinner - SEE DESCRIPTION (G5-213047.1)

Location:	Illinois
Posted:	Aug 8, 2025
Due:	Aug 13, 2025
Agency:	ENERGY, DEPARTMENT OF
Type of Government:	Federal
Category:	66 - Instruments and Laboratory Equipment
Solicitation No:	5-B193-Q-00686-00
Publication URL:	To access bid details, please log in.

Active

Contract Opportunity

Notice ID

5-B193-Q-00686-00

Related Notice

Department/Ind. Agency

ENERGY, DEPARTMENT OF

Sub-tier

ENERGY, DEPARTMENT OF

Office

ARGONNE NATL LAB - DOE CONTRACTOR

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General Information

Contract Opportunity Type: Solicitation (Original)
Original Published Date: Aug 08, 2025 12:29 pm CDT
Original Date Offers Due: Aug 13, 2025 12:00 pm CDT
Inactive Policy: Manual
Original Inactive Date: Aug 14, 2025
Initiative:
- None

Classification

Original Set Aside:
Product Service Code: 6640 - LABORATORY EQUIPMENT AND SUPPLIES
NAICS Code:
- 333242 - Semiconductor Machinery Manufacturing
Place of Performance:
Lemont , IL 60439

USA

Description

Argonne National Laboratory is seeking to source:

1qty Wafer spinner that can spin photoresist and other polymers

- splash ring

- speed 50-99rpm, 100-8000rom (+/- 1 rpm) with 150mm round

- Bowl Cover made of safety glass

- Process bowl of polypropylene (removable)

- d- igital vacuum gauge

- vacuum monitoring

- cover open interlock

- 115VAC 60/50hz 5/3 single phase

- Acceleration 4000 rpm/sec

- spinning time 1s-999s

- 200 recipes with 40 steps each

- waste bottle (0.5l in front of spinner)

- Exhaust connection PG11 tube

- Dimension: (wxdxh) cannot exceed (350x446x430mm)

- directly-coupled hollow shaft motor with a transparent liquid separator on the vacuum line

- spin chucks for : 150mm, 100mm, 3", 2" - with centering rings

- piece chuck with 3mm diameter vacuum area

- spare bowl

- spare waste bottle

- options for future dispense and edge bead upgrades

Please see attached solicitation package - on the ANL-70 form: Please remember to complete points A-F on page 3.

NO SOLICITATION WILL BE CONSIDERED WITHOUT ALL THESE COMPLETED. If any components are missing, your solicitation will be discarded.

All forms and signed solicitation have a requested completion date of 8/13/25 at 12PM CST. If there are any questions please feel free to reach out to awegrzyn@anl.gov.

Attachments/Links

Contact Information

Contracting Office Address

9700 S. Cass Ave
Lemont , IL 60439
USA

Primary Point of Contact

Annette Wegrzyn
awegrzyn@anl.gov
Phone Number 6302522794

Secondary Point of Contact

History

Aug 08, 2025 12:29 pm CDTSolicitation (Original)

Wafer Spinner - SEE DESCRIPTION (G5-213047.1)

See also