| Location: | District of Columbia |
|---|---|
| Posted: | Sep 1, 2026 |
| Due: | Sep 14, 2026 |
| Agency: | DEPT OF DEFENSE |
| Type of Government: | Federal |
| Category: |
|
| Solicitation No: | N00173-26-Q-TB02 |
| Publication URL: | To access bid details, please log in. |
APEX Accelerators are an official government contracting resource for small businesses. Find your local APEX Accelerator (opens in new window) for free government expertise related to contract opportunities.
APEX Accelerators are funded in part through a cooperative agreement with the Department of Defense.
The APEX Accelerators program was formerly known as the Procurement Technical Assistance Program (opens in new window) (PTAP).
COMBINED SYNOPSIS / SOLICITATION FOR COMMERCIAL ITEMS
This is a combined synopsis/solicitation for commercial products or commercial services prepared in accordance with part 12. This announcement constitutes the only solicitation. Offers are being requested and a separate written solicitation will not be issued.
Solicitation number N00173-26-Q-TB02 is issued as a request for quotation (RFQ) for an atomic layer deposition (ALD) reactor for the uniform and conformal deposition of oxide, nitride, and metal films with atomic-layer precision onto substrates of high aspect ratio surface topographies using both traditional thermal atomic layer deposition (ALD) and plasma enhanced ALD (PE-ALD) modes.
This acquisition is set-aside for small business concerns. This solicitation incorporates provisions and clauses by reference. The full text of provisions and clauses may be accessed electronically at www.acquisition.gov.
The Defense Priorities and Allocations System (DPAS) and assigned rating are DO-C9.
See solicitation attachment, below.

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