High-pressure XPS System

Active

Contract Opportunity

NIST-SS25-CHIPS-0027

Title: High-pressure XPS System

The purpose of this sources sought notice is to conduct market research and identify potential sources of commercial products/services that satisfy the Government’s anticipated needs.

BACKGROUND

Advanced in situ and operando methods for real-time monitoring of the chemical status of wafer surfaces, thin films, and interfaces are essential for semiconductor process development and control. NIST is seeking information from sources that may be capable of providing a commercial item solution that meets or exceeds the criteria below.

The required setup consists of a differentially pumped μ-metal shielded Ambient-Pressure (AP) XPS spectrometer (also denoted as Near-Ambient-Pressure (NAP)) equipped with 2D electron detector and X-ray source capable of providing an intense, focused X-ray beam to the sample under elevated pressures. Both the APXPS analyzer and X-ray source are connected to the custom-made reaction chamber made of non-magnetic materials, where the elevated-pressure reactive environment is maintained. The pressure in the reaction chamber varies from UHV to a few Torr, and its gaseous composition includes (but is not limited to) N2, He, H2, Ar, O2, CH4, CF4, and H2O and their mixtures. The reaction chamber has its own pumping system and controls.

AP(NAP) XPS analyzer operates under the above-specified pressure conditions, providing at least a few kcps Ag 3d5/2 count rate at a few Torr pressures from the Ag test sample exited by a designated Al Kα X-ray source. As large as possible: the working distance of the analyzer, electron kinetic energy range (typically 20 eV to 1500 eV and beyond), as well as the highest spectral and spatial resolution, are required.

The designated X-ray source is equipped with a highly X-ray transparent membrane window that can withstand the pressure differential with the reaction chamber. The source provides highly focused monochromatized Al Kα excitation with a resolution better than 250 meV, variable spot size in the order of 1 mm or smaller, and flux higher than 1010 ph/s. The larger distance between the sample and the membrane X-ray window is preferred.

The APXPS analyzer and X-ray source are equipped with differential pumping systems (which are optional and need to be quoted).

The APXPS analyzer, X-ray source, and differential pumping systems are equipped with control electronics, cables, power supplies, close-cycle cooling systems (where necessary), and corresponding software, including data acquisition software.

HOW TO RESPOND TO THIS NOTICE

In responding to this notice, please DO NOT PROVIDE PROPRIETARY INFORRMATION. Please include only the following information, readable in either Microsoft Word 365, Microsoft Excel 365, or .pdf format, in the response: Submit the response by email to the Primary Point of Contact and, if specified, to the Secondary Point of Contact specialist listed at the bottom of this notice as soon as possible, and preferably before the closing date and time of this notice.

• Provide the complete name of your company, address, name of contact for follow-up questions, their email, their phone number and, if your company has an active registration in https://sam.gov, your company’s Unique Entity ID (UEI).


• Identify laboratory equipment that your company sells that is of the nature addressed in the BACKGROUND section of this notice. Include brand name, make, model, and/or other distinguishing information.


• State if your company is the manufacturer of the identified equipment or is a retailer or wholesaler that normally sells the identified equipment. If the latter, indicate whether the manufacturer authorized in writing for your company to sell the identified equipment on behalf of the manufacturer.


• Describe performance capabilities and relevant or beneficial physical and functional features for any equipment you identified to satisfy the NIST-identified minimum specifications described in this notice.


• Identify any aspects of the NIST market research notice, including instructions, and draft minimum specifications in the BACKGROUND section above that could be viewed as unduly restrictive or contain unnecessary barriers that adversely affect your ability to fully participate and indicate why. In such a scenario, please offer suggestions for how the market research notice and draft minimum specifications could be made more inclusive and competitive.


• Discuss whether the equipment that your company sells and which you describe in your response to this notice may be customized to specifications and indicate any limits to customization.


• For the NAICS code listed in this notice:


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  • Indicate whether your company is (a) a small business or (b) other than small business. See the Table of Small Business Size Standards and the associated .pdf download file for small business size standards and additional information.
  
  
  
  


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  • If you believe the NAICS code listed in this notice is not the best NAICS code for the type of product addressed in this notice, identify an alternative NAICS code that you believe would be more appropriate for the planned procurement.
  
  
  
  


• Describe services that are available with the purchase of the aforementioned equipment from your company such as installation, training, and equipment maintenance.


• Describe standard terms and conditions of sale offered by your company for the aforementioned equipment such as: delivery time after your company accepts the order; FOB shipping terms: manufacturer warranty (including details regarding nature and duration); if available, description(s) of available extended warranty; equipment setup and test; operator and service instruction manual(s); cleanup after installation; and if applicable, other offered services. Provide a copy of manufacturer standard terms and conditions that typically relate to the sale of the specified equipment, if available.


• State whether your company offers facility renovation services related to installation of the aforementioned equipment at its delivery destination, if required per the NIST-identified minimum specifications, and provide description of services. Indicate if your company performs the facility renovation services or typically subcontracts the work to another company. Indicate if your company would be interested inspecting the intended installation site during the market research phase.


• State published price, discount or rebate arrangements for aforementioned equipment and/or provide link to access company’s published prices for equipment and services.


• State whether the aforementioned equipment is manufactured in the United States and, if not, state the name of the country where the equipment is manufactured.


• Identify any plans/possibilities for changes in manufacturing location of the aforementioned equipment and provide relevant details.


• If the aforementioned equipment and related services are available for purchase on any existing Federal Supply Schedule contract(s) or other contracts against which NIST may be able place orders, identify the contract number(s) and other relevant information.


• Identify any customers in the public or private sectors in which you provided the aforementioned or similar equipment. Include customer(s) information: company name, phone number, point of contact, email address.


• Provide any other information that you believe would be valuable for NIST to know as part of its market research for this requirement.


• State if you require NIST to provide additional information to improve your understanding of the government’s requirement and/or would like to meet with NIST representatives to discuss the requirement and the capabilities of the identified equipment.

QUESTIONS REGARDING THIS NOTICE

Questions regarding this notice may be submitted via email to the Primary Point of Contact and the Secondary Point of Contact listed in this notice. Questions should be submitted so that they are received by 12:00 PM Eastern Time on November 21, 2024. Questions will be anonymized and answered via sources sought notice amendment following the question submission deadline.

IMPORTANT NOTES

The information received in response to this notice will be reviewed and considered so that NIST may appropriately solicit for its requirements in the near future.

This notice should not be construed as a commitment by NIST to issue a solicitation or ultimately award a contract.

Responses will not be considered as proposals or quotations.

No award will be made as a result of this notice.

NIST is not responsible for any costs incurred by the respondents to this notice.

NIST reserves the right to use information provided by respondents for any purpose deemed necessary and appropriate.

Thank you for taking the time to submit a response to this request.

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