NOTICE OF INTENT TO SOLE SOURCE Infrared Rejector Mirror Pair with Ion Plasma Cleaner and Filter Wheel

NOTICE OF INTENT TO SOLE SOURCE

Infrared Rejector Mirror Pair

with Ion Plasma Cleaner and Filter Wheel

Announcement Type: Special Notice

Announcement Number: NIST-NOI-26-3000939

Subject: Infrared Rejector Mirror Pair with Ion Plasma Cleaner and Filter Wheel

NAICS: 334413

PSC: 5961

Introduction

This is a notice of intent, not a request for a quotation. A solicitation document will not be issued and quotations will not be requested.

Purpose

The National Institute of Standards and Technology (NIST) intends to negotiate a firm-fixed priced purchase order on a sole source basis with Kapteyn-Murnane Laboratories, Inc. (doing business as KMLabs) located at 4775 Walnut Street, Suite 102, Boulder, CO 80301-3081. The applicable UEI is TJNCNAL37AA5. The purchase order will be for an Infrared Rejector Mirror Pair with Ion Plasma Cleaner and Filter Wheel. This product has a USA place of origin in accordance with FAR RFO Part 25. Delivery will be required five months after contractor receipt of order.

Authority

This acquisition is being conducted under the authority of FAR RFO Part 12.102(a) and 41 USC 1901, allowing the Contracting Officer (CO) to solicit from one source. The North American Industry Classification System (NAICS) code for this acquisition is 334413 – Semiconductor and Related Device Manufacturing with a small business size standard of 1,250 Employees.

Description

The Contractor shall provide NIST with a Near Infrared Arterium Rejector Mirror Pair with Ion Plasma Cleaner and Arterium Filter Wheel. Delivery is required within five months after contractor receipt of order.

Detailed specifications of the Arterium products are included below:

1. 
   
   
   
   1. In vacuum filter wheel
      
      
      
      
      1. Shall be configured and optimized for a beam height of 5.5 inches from the table.
      
      
      2. Shall be connected to the high-vacuum beamline via KF-40, KF-25 or KF-16 flange.
      
      
      3. Shall be compatible for operation at high-vacuum.
      
      
      4. Shall accommodate industry standard L1.0 sized filters and frames.
      
      
      5. Filter shall be changed via mechanical high-vacuum rated rotary feedthroughs.
      
      
      6. Shall include a viewport to allow visual inspection of the filter integrity without having to break vacuum.
      
      
      7. Shall be able to insert up to 4 filters in the beam path simultaneously.
      
      
      8. Shall be able to house up to 28 filters in total.
         
         
      
      
      
      
   
   
   2. In vacuum Rejector module pair with ion plasma cleaner
      
      
      
      1. Shall be configured and optimized for a beam height of 5.5 inches from the table.
      
      
      2. Shall be connected to the high-vacuum beamline via KF-40 bulkhead flanges with a maximum beamline insertion length of 400 mm.
      
      
      3. Each module shall have an available 4.5” CF flange on the side (for a pump and/or ion plasma cleaner) and a KF-40 bulkhead flange on the top.
      
      
      4. Mirrors shall be optimized for 30 nm EUV with better than 90% reflectivity at that wavelength. Reflectivity of the mirrors shall be better than 70% over all wavelengths spanning 18 nm to 40 nm.
      
      
      5. Shall include a separate set of two rejector mirrors optimized for 13.5 nm EUV with a reflectivity better than 90% at 13.5 nm that can be swapped out in the future and meet specification with the same geometry.
      
      
      6. Rejector mirrors shall have a clear aperture of at least 0.5 inches.
      
      
      7. Shall be compatible for operation in high-vacuum.
      
      
      8. Rejector modules shall be rigidly coupled together via a zero-length connection.
      
      
      9. The beam jog between the incident EUV beam and a parallel exit beam shall be no greater than 45 mm.
      
      
      10. NIR extinction shall be greater than 95% for each module.
      
      
      11. The first module shall consist of a fixed mirror that is water cooled
      
      
      12. The second module shall consist of a mirror on an adjustable mount to accommodate beam steering that is mechanically adjusted outside of the vacuum environment via rotation feedthroughs.
      
      
      13. Plasma cleaner shall be a PIE Scientific SEMI-KLEEN model that allows operation with air/oxygen and hydrogen. All controllers, cables, and required peripherals needed for operation shall be included.
      
      
      14. Rejector modules shall be configured such that the plasma cleaner can be mounted viewing the reflective surface of the first rejector mirror.
      
      
      
      
   
   
   
   

Sole Source Determination

The sole source determination is based on the following:

The National Institute of Standards and Technology (NIST) Applied Physics Division of the Physical Measurement Laboratory requires a near infrared (NIR) rejector module with a built-in ion plasma cleaner source and an in-vacuum filter wheel to install on an existing KMLabs EUV beamline which is proprietary to its manufacturer. KMLabs is the only vendor authorized to provide all necessary components and service for the proprietary XUUS EUV system NIST owns and operates and KMLabs is therefore the sole source for this additional component requirement. Use of any other vendor would compromise compatibility, reliability, and performance, jeopardizing ongoing scientific research.

Information for Interested Parties

Interested parties that believe they could satisfy the requirements listed above for NIST may clearly and unambiguously identify their capability to do so in writing by or before the response date for this notice. This notice of intent is not a solicitation.

Any questions regarding this notice must be submitted in writing via email to Ms. Lauren Roller, Contract Specialist, at Lauren.Roller@nist.gov. All responses to this notice of intent must be submitted via email to Lauren.Roller@nist.gov so that they are received no later than March 27, 2026 at 11:00 AM Eastern Time.

Each response should include the following Business Information:

1. Contractor Name, Address,


2. Point of Contact Name, Phone Number, and Email address


3. Contractor DUNS


4. Contractor Business Classification (i.e., small business, 8(a), woman owned, hubZone, veteran owned, etc.) as validated in System for Award Management (SAM). All offerors must have an active registration in www.SAM.gov.


5. Capability Statement