Scanning Microwave Impedance Microscopy (sMIM) Cypher S kit for a sMIM interface on Vero Atomic Force Microscopes (AFM).

FBO ANNOUNCEMENT: PRESOLICITATION NOTICE, NOTICE OF INTENT

ACTION CODE: SPECIAL NOTICE

SUBJECT: Sole source – Scanning Microwave Impedance Microscopy (sMIM) Cypher S kit for a sMIM interface on Vero Atomic Force Microscopes (AFM).

SOLICITATION NUMBER: NB643090-25-02343

RESPONSE DATE: 8/13/25

DESCRIPTION:

The National Institute of Standards and Technology, Materials Measurement Science Division (Division 643) of NIST/MML is engaged in a combination of fundamental research, standards production, and applied science and engineering. This work aims to foster innovation in U.S. industry and meet the measurement science needs of our various agency partners. Among its many projects, it focuses on developing nanoscale electrical and mechanical measurement methodologies for characterizing material properties. These methodologies are essential for understanding and advancing the fabrication of semiconductor devices. Many of these characterizations are performed on Atomic Force Microscopes (AFM) like an existing Vero AFM (Oxford Instruments Asylum Research). We have an extensive suite of capabilities on this Vero AFM, including nanoscale electric (current, surface potential, capacitance) and mechanical (various elastic and plastic) capabilities. In some projects, we need to add nanoscale impedance characterization to complement our existing characterizations and have a more compelling understanding of the material properties that we measure. This nanoscale impedance will provide measurements of permittivity and conductivity at the nanoscale, also enabling the identification of dopant polarity (n-type or p-type) and quantification of the carrier dopant levels from intrinsic silicon to 1E20 cm^-3, regardless of the type and species of the dopant. The impedance characterization can be combined with other nano-electric and mechanical AFM measurements, offering innovative ways to investigate domains and interfaces with varying conductivity and buried structures, such as SRAM flash memory.

NIST currently has a scanning Microwave Impedance Microscopy (sMIM) module from PrimeNano installed on an MFP-3D Asylum AFM. However, this AFM lacks some of the advanced electromechanical capabilities of the new Vero AFM. The Vero AFM is required because it allows us to integrate sMIM measurements with the multimodal AFM characterizations available on this new AFM.

The National Institute of Standards and Technology (NIST) intends to negotiate on a sole source basis, under the authority of FAR 13.106-1(b) (1), with Oxford Instruments located in Santa Barbara, CA for the purchase of this equipment.

Sole Source justification is based on the following:

Market research has shown that the only source for this sMIM) Cypher S kit is though the manufacturer, Oxford Instruments.

The Cypher S sMIM kit (holder and accessories) from Oxford Instruments Asylum Research, is the only solution that meets all minimum requirements for this replacement. The kit includes a probe holder and other accessories to interface with a ScanWave 2.0™ Probe Interface module for the Asylum AFM (this interface is provided by PrimeNano). The kit will ensure connectivity by facilitating the direct interface between the ScanWave electronics module and the Vero AFM. Oxford Instruments Asylum Research is the sole manufacturer and distributor of the Cypher S sMIM kit (holder and accessories). Oxford Instruments has provided documentation asserting they are the sole provider of the requirement.

NAICS code for this requirement will be 334516– Analytical Laboratory Instrument Manufacturing with a small business size of 1000 employees.

No solicitation package will be issued. This notice of intent is not a request for competitive quotations; however, interested parties who regard themselves as capable of fulfilling these requirements are invited to submit responses to the Government for consideration. Responses received by 1:00PM EST on 8/13/25 will be considered by the Government.

A determination by the Government not to compete the proposed acquisition based upon responses to this notice is solely within the discretion of the Government. Information received will normally be considered solely for the purpose of determining whether to conduct a competitive procurement.

Inquiry POCs

Erik.Fycklund@nist.gov Primary

Donald.Graham@nist.gov Secondary

National Institutes of Standards and Technologies NIST Acquisition Management Division (AMD)

100 Bureau Dr. Mail Stop 1640

Gaithersburg, MD. 20899-1640