Xenon Difluoride Etcher, 200mm Wafers

Please furnish quotation to supply the materials and/or services indicated on page two (2), review the applicable documentation, and return any required documents to jmangis@anl.gov.

THE ENCLOSED BOOKLET OF Argonne Representations and Certifications (ANL-70B) is included as part of this request and must be completed, signed and returned with your quotation.

Any inquiries are to be directed to Jazlyn Mangis, (630) 252-6884, jmangis@anl.gov

Applicable Documentation:

1. Appendix “A” Argonne Terms and Conditions for Commercial Items, ANL-71COM, dated February 13, 2023. Review and Accept


2. Appendix “B” Argonne Statement of Work, SOW, dated October 31, 2024. Review


3. Moderate Risk On-Site Supplemental Conditions, ANL-366M, dated October 1, 2024. Review and Accept


4. Pre-Award Information, Representations and Certifications, ANL-70B, dated June 6, 2022. Complete and Return


5. Service Contract Act Certification, PD-120, dated December 12, 2007. Complete and Return

Offeror to furnish a published price list to support quoted pricing.

The attached RFP/RFQ and only Argonne Terms and Conditions will govern any resultant order.

Provide the following with your quotation:

1. Signed Page one of the RFQ (ANL-70).


2. Completed Representations and Certifications (ANL-70B).


3. Completed Service Contract Act Certification (PD-120)


4. Provide a published price list or a redacted invoice showing pricing for the quoted, to prove price reasonableness.


5. Verify the country of origin.


6. Are these shipping domestically?


7. Confirm lead time.


8. Are there any available discounts for DOE or does this order fall under GSA contract pricing (if yes, please include contract # and expiration date)?