Tabletop Maskless Aligner System

Active

Contract Opportunity

SLAC National Accelerator Laboratory is operated by Stanford University for the Department of Energy. As a management and operating contractor, subcontracts awarded by the Laboratory are not Federal procurements, and are not directly subject to the Federal Acquisition Regulations in 48 CFR. Nonetheless, certain Federal laws, Executive Orders, and regulations may affect our DOE approved purchasing system, as required by statute, regulation, or contract terms and conditions.

Please review the listed requirements and provide your best and final offer for both price and lead-time.

The follow has been attached for you to complete and review:

1. (BAA) Buy American Act Certification


2. Representations & Certifications Rider


3. SubcontractorFormIIPP (onsite)


4. Certificate of Insurance (onsite)


5. Confirm Attached SLAC terms are accepted: FP Commercial Supplies-Services T&Cs (August 2023)


6. Confirm Attached SLAC terms are accepted: SLAC General Terms and Conditions Supplemental Rider (Rev. August 2026)


7. Confirm Attached SLAC terms are accepted: Green On Site Services Rider(January 2025)/Non-Green On Site Services Rider(January 2025)

1. Request for Quote:

Required item(s) listed below:

1. Tabletop maskless aligner system – QTY:1

Source selection will be based on Lowest Price and Technically Acceptable Method (LPTA).

Technical evaluation criteria are as follows:

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         1. System Form Factor and Vibration Isolation: Tabletop maskless lithography system mounted on an anti-vibration table suitable for cleanroom installation.
         
         
         2. Exposure Strategy and Modes: Dual exposure capability including raster mode and stitching-free mode. Light source: for exposure of broadband and special i-line photoresists
         
         
         3. Resolution and Patterning Performance: Minimum feature size ≤ 0.6 µm Minimum lines and spaces ≤ 0.8 µm CD uniformity ≤ 0.2 µm (3σ) 256-level grayscale mode
         
         
         4. Alignment System: Overlay / 2nd-layer alignment accuracy ≤ 1 µm over 50 × 50 mm² Draw Mode functionality
         
         
         5. Focusing System Real-time autofocus combined with optical focusing capability.
         
         
         6. Stage and Substrate Handling: Vacuum chuck supporting a range of sample sizes Minimum substrate size ≤ 5 mm × 5 mm Maximum substrate size ≥ 6″ Substrate thickness range covers 0.1-10 mm
         
         
         7. Data Input Compatibility: Native support for standard CAD formats including GDSII, DXF, CIF, and BMP.
         
         
         8. Service, Support, Installation, and Delivery: Availability of U.S.-based or local service support (including service contract option), installation and training included, and delivery within no more than 6 months.
         
         
         
         
      
      
      
      
   
   
   
   

Please provide a price and lead time quotation by COB 9/16/2026.

Please be advised that the requirement was also posted on SAM.gov.

Send quote to marissat@SLAC.stanford.edu.

The bid closing date for this requirement is COB 9/16/2026.

Is there any room for additional discount such as for Academic, ICPT, GSA, or Government Institutions?

If possible, please provide a link to your webpage for published price list to substantiate for the prices quoted.

• Buy American Act Certification (BAA) applies to awards with unit price of $15,000.


• Representations & Certifications Rider is required. Once completed the Reps and Certs is valid for one year until renewal. If you have already completed one within the year please disregard. Otherwise, please complete and return.


• Please include in your proposals the Harmonized Tariff Schedule (HTS Code) & ECCN if applicable.


• All subcontractors are required to register in the System for Award Management (www.sam.gov).


• The resulting purchase order will be issued on a fixed price basis. SLAC National Accelerator Laboratory Terms and Conditions for Fixed Price Commercial Supplies and Services (Rev. August 2023), SLAC General Terms and Conditions Supplemental Rider (Rev. August 2026) and Non-Green On Site Services Rider(January 2025) will be made a part of the resulting order.


• Payment Terms will be NET-30


• Freight terms will be FOB Destination Prepaid and Add

You are requested to mark and identify proprietary/confidential information provided in response to the solicitation.

Contact me directly with any questions.

Kind regards,

Marissa Tanomrat

Procurement Commodities Team

SLAC National Accelerator Laboratory

2575 Sand Hill Road

Menlo Park, CA 94025

Email: marissat@slac.stanford.edu

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