Notice of Intent to Noncompetitively Acquire CHIPS R&D On-axis TEM tomography Holder

This notice is not a request for a quotation. A solicitation document will not be issued and quotations will not be requested.

This acquisition is being conducted under the authority of FAR 13.106-1(b).

The Material Measurement Laboratory at the National Institute of Standards and Technology (NIST) is involved in the characterization of metals, semiconductors, and insulators in support of the CHIPS Act. Materials characterization allows industrial scientists to make direct correlations between material processing, (nano)structure, and resulting properties. At NIST, the CHIPS atom probe tomography project will study a wide range of materials with an emphasis on nanostructures containing materials relevant to the semiconductor manufacturing industry. In laser-pulsed atom probe tomography a laser pulse is used to trigger field ion evaporation from a nanoscale specimen tip. Over the past decade or so, commercial atom probe instrumentation has evolved towards using shorter wavelengths, which has significantly improved the quality/utility of atom probe data. As part of the CHIPS atom probe tomography project, we explore various wavelengths of light used to trigger field ion evaporation and compare the performance of state-of-the art commercially available tools with our experimental systems. The data from such experiments will allow NIST to determine the optimum wavelength for atom probe tomography characterization of semiconductor industry relevant specimens. These data will inform the next generation of commercial atom probe instruments and improve the analysis capabilities of atom probe tomography in support of the goals of the CHIPS Act.

We require an on-axis transmission electron microscopy (TEM) tomography holder capable of analyzing the wire-based specimens from our CAMECA Invizo 6000 atom probe microscope located at NIST in Boulder CO. The TEM and atom probe microscope are part of a site-wide user facility, and we have practitioners of all abilities using these tools. For immediate use in support of the CHIPS atom probe tomography project, this on-axis TEM tomography holder will be used to analyze the atom probe specimens before, during, and after analysis in the Invizo 6000 atom probe. This particular atom probe requires single wire-based specimens of a strict size (total length). There are limits as to both the diameter and total length of such wire-based specimens. For an on-axis TEM tomography holder to be used to analyze samples used in the Invizo 6000 atom probe microscope in our user facility, it must meet certain practical requirements.

NIST conducted market research from May 2025 to November 2025 via Intenet searches, GSA searches, Thomas Register, System for Award Management, Trade Magazine review, and Speaking to Colleagues to determine what sources could meet NIST’s minimum requirements. The results of that market research revealed that only Fischione Instruments (UEI: HBFFBGB81KW8) appears to be capable of meeting NIST’s requirements per the following.

NIST requires an on-axis TEM holder for wire-based atom probe specimens. This holder allows us to examine atom probe samples for our Invizo000 deep ultraviolet atom probe. It is essential for our CHIPS project focused on atomic-scale 3D chemical mapping of advanced semiconductor materials, interfaces, and devices. This capability directly supports the CHIPS Metrology R&D Grand Challenge 2: advanced metrology for future microelectronics manufacturing. The Invizo000 atom probe has very strict specimen size and geometry requirements. There is no other vendor that has a commercially available on-axis TEM holder that is compatible with the wire-based atom probe specimens required by the CAMECA Invizo6000 atom probe. Fishione Instruments is the only vendor that makes such a holder.

However, any sources that believe they are capable of meeting NIST’s minimum requirements are encouraged to respond to this notice by the response date to provide the following information at a minimum: Company Unique Entity Identifier number in https://sam.gov; details about what your company is capable of providing that meets or exceeds NIST’s minimum requirements; whether your company is an authorized reseller of the product or service being cited and evidence of such authorization; and any other information that can help NIST determine whether this requirement may be competitively satisfied.