TECHNOLOGY/BUSINESS OPPORTUNITY Method of Fabricating Silicon Carbide Nanoneedles

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Contract Opportunity

Opportunity:

Lawrence Livermore National Laboratory (LLNL), operated by the Lawrence Livermore National Security (LLNS), LLC under contract no. DE-AC52-07NA27344 (Contract 44) with the U.S. Department of Energy (DOE), is offering the opportunity to enter into a collaboration to further develop and commercialize its Method of Fabricating Silicon Carbide Nanoneedles.

Background:

Silicon carbide has properties that make it ideal for electronic, MEMS and transdermal drug delivery devices (e.g., high thermal conductivity, chemical resistance and biocompatibility). Conventional fabrication of silicon carbide microneedles uses molds typically prepared by using a mixture of resin and hydrate material. This methods limits the shape of the tapered sharp tip. By adapting semiconductor processing methods to this application may allow for nano-level precision. The challenge is that etching processes, particularly isotropic etching, that work well for silicon do not work for silicon carbide since the latter is relatively inert.

Description:

LLNL researchers have developed an approach to form silicon carbide (and diamond) nanoneedles using plasma etching that create micro pillars followed by chemical etching of the pillars in forming gas containing hydrogen and nitrogen. Combining these two etching processes allow for fabrication of micro- and nanoneedles that are thinner and sharper than conventionally fabricated needles.

Advantages/Benefits:

Fabrication of micro and nanoneedles with tips as narrow as 15 nm that cannot be fabricated using conventional fabrication methods (e.g., from molds made of resin and hydrate material).

Potential Applications:

• Optical switches


• Field emission tips


• Probes for atomic force microscopes


• Transdermal delivery of drugs and proteins


• Electronic applications


• Diamond nanoneedles

Development Status:

Current stage of technology development: TRL ☐ 0-2 ☒ 3-5 ☐ 5-9

LLNL has filed for patent protection on this invention.

U.S. Patent Application No. 20220040463 SILICON CARBIDE NANONEEDLES AND FABRICATION THEREOF published 2/10/2022

U.S. Patent Application No. 12246155 SILICON CARBIDE NANONEEDLES AND FABRICATION THEREOF published 3/11/2025

LLNL is seeking industry partners with a demonstrated ability to bring such inventions to the market. Moving critical technology beyond the Laboratory to the commercial world helps our licensees gain a competitive edge in the marketplace. All licensing activities are conducted under policies relating to the strict nondisclosure of company proprietary information.

Please visit the IPO website at https://ipo.llnl.gov/resources for more information on working with LLNL and the industrial partnering and technology transfer process.

Note: THIS IS NOT A PROCUREMENT. Companies interested in commercializing LLNL's Method of Fabricating Silicon Carbide Nanoneedles should provide an electronic OR written statement of interest, which includes the following:

1. Company Name and address.


2. The name, address, and telephone number of a point of contact.


3. A description of corporate expertise and/or facilities relevant to commercializing this technology.

Please provide a complete electronic OR written statement to ensure consideration of your interest in LLNL's Method of Fabricating Silicon Carbide Nanoneedles.

The subject heading in an email response should include the Notice ID and/or the title of LLNL’s Technology/Business Opportunity and directed to the Primary and Secondary Point of Contacts listed below.

Written responses should be directed to:

Lawrence Livermore National Laboratory

Innovation and Partnerships Office

P.O. Box 808, L-779

Livermore, CA 94551-0808

Attention: IL-13538

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