Sources Sought Notice for CHIPS R&D Optical frequency comb, Control electronics

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Contract Opportunity

The purpose of this sources sought notice is to conduct market research and identify potential sources of commercial products/services that satisfy the Government’s anticipated needs.

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

The CHIPS Metrology Program includes research in Grand Challenge 5, Modeling/Simulating Semiconductor Manufacturing Processes. To address this Grand Challenge, the project RF Waveform and Rapid Frequency-Comb Diagnostics for Plasma Etching seeks to purchase a Mid-Infrared Femtosecond Laser Source, Femtosecond Laser Control Electronics, and an Optical Frequency Reference, quantity one (1) each. The laser system and optical reference will enable the application of novel optical diagnostics like broadband laser spectroscopy to the study of chemical transformations in key plasma etching processes.

Plasma etching—performed across the semiconductor manufacturing ecosystem—is a highly nonlinear process involving arbitrary radiofrequency (RF) waveforms, dynamic electrical properties, and complex chemistry in a confined non-equilibrium environment. Metrology tools are needed to better correlate reactor inputs with etching outcomes, and to precisely evaluate consistency across plasma etching tools. To do so, we will develop µs time-resolved frequency comb diagnostics to meet industry needs including reliable in-situ monitoring of plasma chemistry and real-time data generation for intelligent design of next-generation plasma etching processes. This requires a mid-infrared femtosecond laser system (laser source and control electronics) and an optical frequency reference.

NIST anticipates procuring an DAQ System and is seeking information from manufacturers capable of meeting the following needs:

Line Item 0001:

Description: Mid-Infrared femtosecond laser source

Quantity: One (1)

1. Technical Specifications
   
   
   
   
   1. Mid-infrared laser pulse repetition rate 100 MHz ± 5 MHz.
      
      
      
      1. Radiofrequency (RF) monitoring output port for measured repetition rate signal.
      
      
      
      
   
   
   2. Mid-infrared laser pulse width
      
   3. Minimum tunable laser output wavelength from 3.0 μm to 4.8 μm.
      
      
      
      1. Output wavelength tuning is fully automated via software control.
      
      
      
      
   
   
   4. For mid-infrared laser output tunable from 3.0 μm to 4.0 μm:
      
      
      
      1. Pulse bandwidth ≥100 cm−1.
      
      
      2. Laser average power ≥100 mW.
      
      
      
      
   
   
   5. For mid-infrared laser output tunable from 4.0 μm to 4.8 μm:
      
      
      
      1. Pulse bandwidth ≥50 cm−1.
      
      
      2. Laser average power ≥25 mW.
      
      
      
      
   
   
   6. Additional considerations for mid-infrared laser output tunable from 2.6 μm to 3.0 μm:
      
      
      
      1. Pulse bandwidth ≥50 cm−1.
      
      
      2. Laser average power ≥25 mW.
      
      
      
      
   
   
   7. Additional considerations for mid-infrared laser output tunable from 4.8 μm to 5.2 μm:
      
      
      
      1. Pulse bandwidth ≥50 cm−1.
      
      
      2. Laser average power ≥25 mW.
      
      
      
      
   
   
   8. Mid-infrared laser output is free space.
   
   
   9. Mid-infrared laser output is linearly polarized.
   
   
   10. Laser, laser drivers, and laser controllers operable with power from standard US wall output voltage of 120 V.
   
   
   11. Laser head dimensions of:
       
       
       
       1. Width ≤450 mm.
       
       
       
       
   
   
   
   

1. 
   
   
   
   1. 
      
      
      
      1. Length ≤450 mm.
      
      
      2. Height ≤100 mm.
      
      
      
      
   
   
   
   

Line Item 0002:

Description: Femtosecond laser control electronics

Quantity: One (1)

1. Technical Specifications
   
   
   
   
   1. Rack mountable control unit.
      
      
      
      1. Compatible with standard 19-inch instrument rack.
      
      
      
      
   
   
   2. Umbilical cord to laser head of length 2 m ± 1 m.
   
   
   3. Control unit interfaces vis USB with personal computer running Windows.
      
      
      
      1. Personal computer not included.
      
      
      
      
   
   
   4. Control electronic compatible with mid-infrared femtosecond laser source as described in Line Item 0001.
   
   
   
   

Line Item 0003:

Description: Ultrastable laser system

Quantity: One (1)

1. Technical Specifications
   
   
   
   
   1. Ultrastable laser is a continuous-wave (cw) laser.
   
   
   2. Laser output wavelength between 1061 nm and 1067 nm.
      
      
      
      1. Preference for output wavelength near the lower limit of 1061 nm.
      
      
      
      
   
   
   3. Ultrastable laser locked to an optical frequency cavity.
   
   
   4. Optical reference cavity finesse >40 000.
   
   
   5. Ultrastable laser linear drift rate
      
   6. Ultrastable laser relative stability ≤10−11 at 1 ms.
      
      
      
      1. Relative laser stability metric does not include linear drift.
      
      
      
      
   
   
   7. Optical reference cavity input/output ports fiber coupled with FC/APC connectors.
   
   
   8. Ultrastable laser locking electronics included.
      
      
      
      1. Minimum of three signal outputs.
      
      
      2. Proportional-integral-derivative (PID) loop for laser stabilized.
      
      
      
      
   
   
   9. Optical reference cavity unit dimensions:
      
      
      
      1. Width ≤200 mm
      
      
      
      
   
   
   
   

1. 
   
   
   
   1. 
      
      
      
      1. Length ≤200 mm
      
      
      2. Height ≤100 mm
      
      
      
      
   
   
   2. Beat note detection unit included for generating a laser beat note between the ultrastable laser (included) and a frequency comb laser (not included).
      
      
      
      1. The beat note detection unit for use with a frequency comb laser (not included) with optical intensity spectrum center wavelength ≈1050 nm and full-width at one-tenth-maximum wavelength range of 1035 nm to 1070 nm.
      
      
      
      
   
   
   
   

NIST is seeking information from sources that may be capable of providing a solution that will achieve the objectives described above.

HOW TO RESPOND TO THIS NOTICE

In responding to this notice, please DO NOT PROVIDE PROPRIETARY INFORMATION. Please include only the following information, readable in either Microsoft Word 365, Microsoft Excel 365, or .pdf format, in the response: Submit the response by email to the Primary Point of Contact and, if specified, to the Secondary Point of Contact listed in this notice as soon as possible, and preferably before the closing date and time of this notice. Please note that to be considered for award under any official solicitation, the entity must be registered and “active” in SAM at the time of solicitation response.

• Provide the complete name of your company, address, name of contact for follow-up questions, their email, their phone number and, if your company has an active registration in https://sam.gov, your company’s Unique Entity ID (UEI).


• Identify the equipment that your company sells that can meet the objectives addressed in the BACKGROUND section of this notice. For each product recommended to meet the Government’s requirement, provide the following:
  
  
  
  • Manufacturer name
  
  
  • Model number
  
  
  • Technical specifications
  
  
  • If your company is not the manufacturer, provide information on your company’s status as an authorized reseller of the product(s)
  
  
  
  


• Describe performance capabilities of the product(s) your company recommends to meet the Government’s requirements. Additionally, if there are other features or functions that you believe would assist NIST in meeting its objectives described above, please discuss in your response.
  
  
  
  • Discuss whether the equipment that your company sells and which you describe in your response to this notice may be customized to specifications and indicate any limits to customization.
  
  
  
  


• Identify any aspects of the NIST market research notice, including instructions, and draft minimum specifications in the BACKGROUND section you cannot meet and state why. Please offer suggestions for how the market research notice and draft minimum specifications could be made more competitive.


• State whether the proposed equipment is manufactured in the United States and, if not, state the name of the country where the equipment is manufactured.


• Identify any plans/possibilities for changes in manufacturing location of the aforementioned equipment and provide relevant details, including timeline.


• For the NAICS code listed in this notice:


• 
  
  
  
  • Indicate whether your company is (a) a small business or (b) other than small business. See the Table of Small Business Size Standards and the associated .pdf download file for small business size standards and additional information.
  
  
  
  


• 
  
  
  
  • If you believe the NAICS code listed in this notice is not the best NAICS code for the type of product addressed in this notice, identify an alternative NAICS code that you believe would be more appropriate for the planned procurement.
  
  
  
  


• Describe services that are available with the purchase of the aforementioned equipment from your company such as installation, training, and equipment maintenance.


• Describe standard terms and conditions of sale offered by your company for the recommended equipment such as: delivery time after your company accepts the order; FOB shipping terms; manufacturer warranty (including details regarding nature and duration); if available, description(s) of available extended warranty; equipment setup and test; operator and service instruction manual(s); cleanup after installation; and if applicable, other offered services. Provide a copy of manufacturer standard terms and conditions that typically relate to the sale of the specified equipment, if available.


• State whether your company offers facility renovation services related to installation of the recommended equipment at its delivery destination, if required per the NIST-identified minimum specifications, and provide description of said services. Indicate if your company performs the facility renovation services or typically subcontracts the work to another company. Indicate if your company would be interested in inspecting the intended installation site during the market research phase.


• State published price, discount, or rebate arrangements for recommended equipment and/or provide link to access company’s published prices for equipment and services.


• If the recommended equipment and related services are available for purchase on any existing Federal Supply Schedule contract(s) or other contracts against which NIST may be able to place orders, identify the contract number(s) and other relevant information.


• Identify any customers in the public or private sectors to which you provided the recommended or similar equipment. Include customer(s) information: company name, phone number, point of contact, email address.


• Provide any other information that you believe would be valuable for NIST to know as part of its market research for this requirement.


• State if you require NIST to provide additional information to improve your understanding of the government’s requirement and/or would like to meet with NIST representatives to discuss the requirement and the capabilities of the identified equipment.

QUESTIONS REGARDING THIS NOTICE

Questions regarding this notice may be submitted via email to the Primary Point of Contact and the Secondary Point of Contact listed in this notice. Questions should be submitted so that they are received 5 calendar days prior to the response date. If the Contracting Officer determines that providing a written amendment to this notice to document question(s) received would benefit other potential respondents, the questions would be anonymized, and a written response to such question(s) would be provided via an amendment to this notice.

IMPORTANT NOTES

This notice is for market research purposes and should not be construed as a commitment by NIST to issue a solicitation or ultimately award a contract. There is no solicitation available at this time.

This notice does not obligate the Government to award a contract or otherwise pay for the information provided in response.

NIST reserves the right to use information provided by respondents for any purpose deemed necessary and legally appropriate.

Any organization responding to this notice should ensure that its response is complete and sufficiently detailed to allow the Government to determine the organization’s capability.

Responses will not be considered as proposals or quotations.

No award will be made as a result of this notice.

NIST is not responsible for any costs incurred by the respondents to this notice.

NIST reserves the right to use information provided by respondents for any purpose deemed necessary and appropriate.

Thank you for taking the time to submit a response to this request!

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